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Design, modeling, fabrication, and testing of a multistage micro gas compressor with piezoelectric unimorph diaphragm and passive microvalves for microcooling applications
This dissertation investigates the development of a multistage micro gas compressor utilizing multiple pump stages cascaded in series to increase the pressure rise with passive microvalves and piezoelectric unimorph diaphragms. This research was conducted through modeling, simulation, design, and fa
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