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Quartz-mems: Wet chemical etching assisted by electromagnetic energy sources for the development of quartz crystal to be used for microelectromechanical systems

Clower, William J.
Louisiana Tech Digital Commons · Papers
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crystalelectrical-and-computer-engineeringfabricationmemsquartz
Quartz crystal resonators have been the most commonly used timing devices to date. Today's timing market requires devices to be as small as possible and consume smaller amounts of energy. Because of the market demand, many startup companies have formed to develop silicon resonators as timing devices
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