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Modeling and experimental verification of growth of an axisymmetric cylindrical rod by three-dimensional laser-induced chemical vapor deposition

Chen, Qing
Louisiana Tech Digital Commons · Papers
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chemical-engineeringmathematics
Three-dimensional laser-induced chemical vapor deposition (3D-LCVD) is a recently developed micro-manufacturing process that holds great potential for the production of complex microstructures with high aspect ratio. A laser beam is focused through a vacuum chamber window onto a movable substrate. T
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