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Internal combination resonance in a Micro Electro-Mechanical three-axis gyroscope: Experimental results and reduced-order modelling via invariant manifolds

Alessio Colombo et al.
HAL (France) · Papers
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mems
This work investigates internal combination resonance in a Micro-Electro-Mechanical System (MEMS) three-axis gyroscope, where energy couples among three vibrational modes via the relationship ω1 + ω2 ≈ ω3 . The phenomenon is first characterised experimentally through frequency response measurements
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