A Unified Physics-Aware Quantum Machine Learning Framework across Power GaN HEMTs and Logic Nanowire FETs: Predicting Unseen Process Splits and Held-Out Geometry Combinations with Lower Error and Tighter Split-to-Split Variability

We present a unified reinforcement-learning (RL) framework that discovers compact parametrized quantum circuits (PQCs) for data-scarce device modeling. A graph neural network (GNN) policy optimized by proximal policy optimization (PPO) searches circuit architectures using leave-one-group-out cross-v