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A Minimal Self-Consistent Model for the Nonlinear Dynamics of Asymmetric Capacitively Coupled Radio-Frequency Plasmas
We develop a minimal self-consistent lumped-element model for the nonlinear radio-frequency dynamics of geometrically asymmetric capacitively coupled plasmas. The fast electrical response is described by three dynamical variables: the powered-sheath charge, the blocking-capacitor voltage, and the di
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