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Unveiling the Scaling Potential of Drain Merge through Active (DMtA) in CFETs: Breaking the Super-Via Bottlenecks and Unlocking New PPA Boosters

Jiang, Jingru et al.
arXiv (All) · Papers · License: Open Access
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mesoscale-and-nanoscale-physics
mesoscale and nanoscale physics
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Record · ID 975376
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