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Non-destructive 3D doping imaging of silicon sensors

Xie, Xiangyu et al.
arXiv (All) · Papers
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instrumentation-and-detectors
Silicon sensors are the foundational detection medium for X-rays and charged particles. While their bulk dopant distribution determines device performance, it is conventionally assumed homogeneous because traditional profiling is destructive, spatially restricted, and insensitive at the relevant con
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