Conceptio › Archive › Spectrum: Concordia University Research Repository
Spectrum: Concordia University Research Repository metadata only

Experimental investigations of corona-discharge oxidation of silicon

Sayedi, Sayed-Masoud
Spectrum: Concordia University Research Repository · Papers
Open Source ↗Direct PDF ↓
As integrated-circuit device dimensions decrease, the importance of having new reliable processes for growing MOS gate oxides becomes more and more evident. Short process times and low process temperatures are desirable features in view of tight thermal budget constraints and the need for precise lo
Conceptio Open Archive

Analyze & explore related research in Conceptio

Connect this record directly into your research workflow or AI agent. Explore citations across open repositories, query full text, and export structured proof bundles.

This document is indexed with metadata only: full text is not available in the archive for this record. Open the official source ↗

Related documents

Record · ID 1020647
Retrieved via Conceptio: every document is proof-bundled with source, license, and retrieval metadata.
Bring this data into your agent: Connect via MCP or API · 20 free credits to start · no card required
Read the Docs → · View CLI source on GitHub · Conceptio Open Knowledge Archive