arXiv (OAI Expanded)
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Heating of black-Si by microwaves at 2.45 GHz: effect of nano-needle orientation
Silicon, which is highly reflective and has negligible absorption at the microwave 2.45 GHz range, can be heated when it is turned into black-Si with a surface texture of nano-needles made by SF6/O2 plasma etching. Microwave heating of flat Si and of black-Si with vertical and with tilted (oriented)
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