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Nouvelle technologie hybride pour le dépôt en film mince d’oxydes transparents conducteurs pour applications photovoltaïques

Zakariae En-Naji
HAL (France) · Papers · License: Open Access
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Microwave plasma, Oxydes transparents conducteurs, Low-Damage thin film deposition, Transparent conductive oxides, Évaporation assistée par plasma, Plasma-Assisted evaporation, Plasma micro-Onde, 1
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Record · ID 1079538
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