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Simulation Study of Short Channel Effects in New Hemispherical Gate-All-Around (HGAA) MOS Devices

Francis Balestra et al.
HAL (France) · Papers · License: Open Access
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DIBL, Hemispherical gate-all-around MOSFET, Pure spherical GAA, 0, Best electrostatic control, HGAA, Short-channel effect, Subthreshold swing
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Record · ID 1090532
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