Large Hybrid High Precision MEMS Mirrors

Name: Large Hybrid High Precision MEMS Mirrors
Published: 2011
License: Open Access

Bayat, Dara · 2011

DataCite · Datasets · License: Open Access · 2011

hybrid, high precision, moems, microfabrication, large mirror, flat mirror, electrostatically actuated mirror, magnetically actuated mirror

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Record · ID 1100068
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