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MEMS beams with defects: a model of non-idealrods using a Cosserat approach for component level modelling.
We present and derive a technique for the introduction of defects into a beam model based on the Cosserat theory of rods. The technique is designed for the derivation of component models of non-ideal rods for use in MEMS devices. We also present a worked through example of blob/nick defects (where t
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