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Effect of irradiation temperature on post-irradiation strain levels in Ge ₓSi ₁₋ₓ/Si strained layer heterostructures

Glasko, J. M. et al.
Open Research · Papers
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Double crystal x-ray diffraction (DCXRD), transmission electron microscopy (TEM), and Rutherford backscattering spectroscopy and channelling (RBS-C) were used to study the effect of irradiation temperature and ion-energy on the perpendicular strain (ε ⊥) in Ge xSi 1-xSi strained layer heterostructur
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