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The effects of argon dilution on hydrogenated amorphous silicon prepared by d.c. plasma glow discharge : optical and infrared spectroscopic studies
Hydrogenated amorphous silicon (a-Si :H) films were prepared from the discharge of pure silane and silane diluted in argon using a home-built hori zontal direct current(d.c.) plasma glow discharge system. The effects of argon dilution of silane on the optical properties, chemical bonding properties,
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