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Design and fabrication of suspended-gate MOSFETs for MEMS resonator, switch and memory applications

Abelé, Nicolas · 2007
DataCite · Datasets · 2007
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Wireless communication systems and handset devices are showing a rapid growth in consumer and military applications. Applications using wireless communication standards such as personal connectivity devices (Bluetooth), mobile systems (GSM, UMTS, WCDMA) and wireless sensor network are the opportunit
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