HAL (France)open access
Femtosecond Laser Percussion Drilling of Silicon Using Repetitive Single Pulse, MHz-, and GHz-Burst Regimes
0, Ultrafast laser processing, Femtosecond bursts, 1, Percussion drilling, Silicon, Laser-material interaction
This document is indexed with metadata only — full text is not available in the archive for this record.
Open the official source ↗
Record · ID 144853
Retrieved via
Conceptio — every document is proof-bundled with source, license, and retrieval metadata.