Finland – Laboratory, optical and precision equipments (excl. glasses) – CONTRACT AWARD NOTICE: Optical film stress measurement tool — VTT Technical Research Centre of Finland Ltd (FIN) · 660000 EUR

VTT Technical Research Centre of Finland Ltd · EU Tenders Electronic Daily (TED)

EU TED (Tenders Electronic Daily) · Contracts

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Finland – Laboratory, optical and precision equipments (excl. glasses) – CONTRACT AWARD NOTICE: Optical film stress measurement tool — VTT Technical Research Centre of Finland Ltd — EU supplies notice (734694-2026)

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2026-10-22+00:00 08:08:43+00:00 660000 RES-0001 selec-w TEN-0001 TEN-0002 tenders 2 CON-0001 LOT-0000 TEN-0001 false false 1200000 no TPA-0001 LOT-0000 FSMG TEN-0002 false false 660000 no TPA-0002 LOT-0000 LOT-Quantum Design GmbH (also “LOT”) CON-0001 2026-08-21+03:00 2026-10-07+03:00 ORG-0002 LOT-Quantum Design GmbH (also “LOT”) TEN-0002 TPA-0001 ORG-0004 TPA-0002 ORG-0003 29 http://www.oikeus.fi/markkinaoikeus ORG-0001 Markkinaoikeus Radanrakentajantie 5 Helsinki 00520 FI1B1 FIN 3006157-6 +358 295643300 markkinaoikeus@oikeus.fi false false https://www.vttresearch.com/fi ORG-0002 VTT Technical Research Centre of Finland Ltd P.O. Box 1000, VTT Espoo 02044 FI1B1 FIN 2647375-4 VTT Technical Research Centre of Finland Ltd +358 20722111 kilpailutus@vtt.fi large ORG-0003 LOT-Quantum Design GmbH Im Tiefen See Darmstadt 64293 DE711 DEU DE284734472 large ORG-0004 FSMG 196C Rue du Rocher de Lorzier Moirans 38430 FRK24 FRA Frontier Semiconductor http://hankintailmoitukset.fi ORG-0005 Hansel Oy (Hilma) Mannerheiminaukio 1a Helsinki 00100 FI1B1 FIN FI09880841 eSender 029 55 636 30 tekninen@hankintailmoitukset.fi 00734694-2026 206/2026 2026-10-23+02:00 2.3 eforms-sdk-1.13 2db5b351-2a29-4bdc-bf10-d0fe830aeecd baa6c896-db81-4319-9493-dd53e456a8e4 2026-10-22+03:00 11:08:42+03:00 01 32014L0024 can-standard ENG pub-undert econ-aff ORG-0002 ted-esen ORG-0005 The tender process is based on the open procedure applicable to contracts that exceed the EU procurement threshold. open 9551e5f4-ecfd-4718-9d7a-7e80ae1cee0c-01 false VTT 33/206/2026 CONTRACT AWARD NOTICE: Optical film stress measurement tool This is a contract award notice under the Finnish Act on Public Procurement and Concession Contracts, setting out the outcome of the procurement.

THE OBJECT OF THE TENDER PROCESS

The object of the procurement is a 200 mm automated film stress and wafer bow analysis system using a non-contact laser scanning technique for the VTT Micronova cleanroom. The procurement includes a room temperature automated thin-film stress measurement system, cassette load lock, robot to handle the wafers, programmable automatic wafer scanning system, and analysis software. The tool should be designed to be used inside the clean room. The supplier will take to consideration the environmental conditions of the tool installation location and will work together with VTT to reduce the external impact on facility. The automated thin-film stress analysis system is for non-patterned, non-texture 200 mm wafer stress measurement.

The technical specification of the object of the tender and its minimum requirements is described in more detail in this Annex 1 of the invitation to tender. The tendered Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1 and Annex 2 (“Facilities, materials and connector types”).

A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders.

The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 80 % price weighting and 20 % quality weighting.

A reference price has to be given for the equipment that meets all the requirements set in the invitation to tender, especially its Annex 1.

Partial tenders will not be accepted.

NON-MANDATORY OPTIONAL FEATURES

Please see Annex 1 section 3.4.10 of the invitation to tender. The tenderer may offer the feature as an optional item in its tender. PLEASE NOTE: the optional item shall not be included in the comparison price of the device but shall be priced separately. supplies The object of the tender process is described in more detail in the invitation to tender documents. 38000000 Tekniikantie 17 Espoo 02150 FI1B1 FIN LOT-0000 false false no-eu-funds poi-exa 80 price Price 80 % See call for tenders poi-exa 20 quality Quality comparison See call for tenders ORG-0002 ORG-0002 14 Days ORG-0002 ORG-0001 true false none none VTT 33/206/2026 CONTRACT AWARD NOTICE: Optical film stress measurement tool This is a contract award notice under the Finnish Act on Public Procurement and Concession Contracts, setting out the outcome of the procurement.