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Modeling of MEMS Resonator Piezoelectric Disc Partially Covered with Electrodes

Ismail Naciri et al.
HAL (France) · Papers · License: Open Access
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anti
0, Piezoelectric Resonator Disc, Legendre Polynomial Approach, MEMS Resonators, Anti-resonant Frequencies, Centralized Metallization, Electrical Admittance, Resonant
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Record · ID 361946
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