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A MEMS based visible-NIR Fourier transform microspectrometer - art. no. 61860C
Design, fabrication and characterization of a novel out-of-plane vertical comb-drive actuator based Fourier transform microspectrometer (FTS) is presented. The spectrometer utilizes resonant mode vertical comb actuators as a variable-depth diffraction grating and a single photodetector to monitor th
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