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A lateral comb drive on PMMA by hot embossing technique
The objective of this work is to fabricate a laterally driven comb drive on low-cost poly-methyl-meth-acrylate (PMMA) by hot embossing technology. An electrostatic comb drive is one of the most important components in Micro-Electro-Mechanical Systems (MEMS). A comb drive can work as both a sensor an
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