Koc University Digital Collectionsmetadata only
MEMS stage integrated with microlens arrays for high-resolution beam steering
chemistry; nanoscience and nanotechnology, hybrid integration; comb drive; beam steering
This document is indexed with metadata only — full text is not available in the archive for this record.
Open the official source ↗
Record · ID 934968
Retrieved via
Conceptio — every document is proof-bundled with source, license, and retrieval metadata.