Koc University Digital Collections
metadata only
A 2D MEMS stage for optical applications
A 2D MEMS platform for a microlens scanner application is reported. The platform is fabricated on an SOI wafer with 50/μm thick device layer. Entire device is defined with a single etching step on the same layer. Through four S-shaped beams, the device is capable of producing nonlinear 2D motion fro
Conceptio Open Archive
Analyze & explore related research in Conceptio
Connect this record directly into your research workflow or AI agent. Explore citations across open repositories, query full text, and export structured proof bundles.
This document is indexed with metadata only: full text is not available in the archive for this record. Open the official source ↗
Related documents
- MEMS raster correction scanner for SXGA resolution retinal scanning display#934733
- Nonlinear frequency response of comb-driven microscanners#934734
- MEMS stage integrated with microlens arrays for high-resolution beam steering#934968
- MEMS scanners for display, imaging, and spectroscopy and their dynamic characterization#954391
- Torsional MEMS scanner design for high-resolution display systems#934833
Record · ID 954447
Retrieved via Conceptio: every document is proof-bundled with source, license, and retrieval metadata.
Retrieved via Conceptio: every document is proof-bundled with source, license, and retrieval metadata.
Bring this data into your agent: Connect via MCP or API · 20 free credits to start · no card required
Read the Docs → · View CLI source on GitHub · Conceptio Open Knowledge Archive
Read the Docs → · View CLI source on GitHub · Conceptio Open Knowledge Archive