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HVPE Growth of Si-Doped $β$-Ga$_2$O$_3$ on Sapphire: Influence of Substrate Offcut on Structural and Electrical Properties

Sarker, Sourav et al.
arXiv (All) · Papers
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Si-doped $β$-Ga$_2$O$_3$ films were heteroepitaxially grown on sapphire substrates using HVPE. The influence of sapphire offcut on growth kinetics, surface morphology, crystalline quality, and electrical transport properties was systematically investigated. Growth kinetics studies revealed a strong
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