2026-09-02+00:00 11:34:32+00:00 1256300 RES-0001 selec-w TEN-0001 t-med 2 CON-0001 LOT-0000 TEN-0001 1256300 no TPA-0001 LOT-0000 tenderReference-4907645-946462 CON-0001 2026-09-02Z 2026-09-02Z EQUIPMENT PURCHASE AGREEMENT Ref.no. 12/206/2026 / Ion beam trimmer TEN-0001 TPA-0001 ORG-0003 29 http://www.oikeus.fi/markkinaoikeus ORG-0001 Markkinaoikeus Radanrakentajantie 5 Helsinki 00520 FI1B1 FIN 3006157-6 +358 295643300 [email protected] false false https://www.vttresearch.com/fi ORG-0002 VTT Technical Research Centre of Finland Ltd P.O. Box 1000, VTT Espoo 02044 FI1B1 FIN 2647375-4 VTT Technical Research Centre of Finland Ltd +358 20722111 [email protected] medium ORG-0003 Sales Department Clemens-Winkler-Str. Chemnitz 09116 DED41 DEU DE288142276 http://hankintailmoitukset.fi ORG-0004 Hansel Oy (Hilma) Mannerheiminaukio 1a Helsinki 00100 FI1B1 FIN FI09880841 eSender 029 55 636 30 [email protected] 00609219-2026 170/2026 2026-09-03+02:00 2.3 eforms-sdk-1.13 a6c5650c-5070-425c-b74e-3105efcf4f3f d7727dd7-a563-44c8-aec4-b0cd6b2af621 2026-09-02+00:00 11:34:31+00:00 01 32014L0024 can-standard ENG pub-undert econ-aff ORG-0002 ted-esen ORG-0004 The tender process is based on the open procedure applicable to contracts that exceed the EU procurement threshold. open 3762acdb-b9e5-47b3-802e-b4d1bc8d4703-01 true Hankinnasta on julkaistu ennakkoilmoitus 17.12.2025 81/206/2025 / Prior information notice: Ion beam trimmerP Ref.no. 12/206/2026 Ion beam trimmer The object of the tender was 200 mm wafer particle beam trimming tool for VTT Micronova cleanroom semiconductor front end processing. The particle beam may be an ion beam, or a gas cluster beam, with a full width at half maximum within 3-15 mm.
The tool had to be compatible with installation in an ISO 4 classified cleanroom.
The object of the tender process was described in more detail in the invitation to tender documents. supplies The object of the tender process was described in more detail in the invitation to tender documents. 38000000 Please see the invitation to tender. Tietotie 3 Espoo 02600 FI1B1 FIN LOT-0000 false no-eu-funds per-exa 90 price The evaluation of the tenders is described in section 'Grounds for decision'. per-exa 10 quality The evaluation of the tenders is described in section 'Grounds for decision'. ORG-0002 The appeal period is determined in accordance with the Act on Public Procurement and Concession Contracts (1397/2016). ORG-0001 true false none none Ref.no. 12/206/2026 Ion beam trimmer The object of the tender was 200 mm wafer particle beam trimming tool for VTT Micronova cleanroom semiconductor front end processing. The particle beam may be an ion beam, or a gas cluster beam, with a full width at half maximum within 3-15 mm.
The tool had to be compatible with installation in an ISO 4 classified cleanroom.
The object of the tender process was described in more detail in the invitation to tender documents. supplies The object of the tender process was described in more detail in the invitation to tender documents. hum-right 38000000 Please see the invitation to tender. Tietotie 3 Espoo 02600 FI1B1 FIN 36 2000-01-01Z